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  • Die Kombination von Plasmanitrierung und plasmagestützter Schichtabscheidung aus der Gasphase (PACVD) in einem Verfahrensablauf
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Die Kombination von Plasmanitrierung und plasmagestützter Schichtabscheidung aus der Gasphase (PACVD) in einem Verfahrensablauf

Oliver Morlok
Jun 03, 1998
$103.95
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Overview

Appropriate for
Language
No. of Pages
147
IPA-IAO - Forschung und Praxis
Publisher: Springer
Shipping dimensions: 9" H x 6" W x 1" L
ISBN: 9783540645672
Life stage: null

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